| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic beam equipment using an electron gun wherein brightness is increased by efficiently heating the cathode. SOLUTION: This electronic beam equipment is provided with an electron gun having a thermionic emission cathode 1, a Wehnelt 2 and an anode 3, and a shaft centering device 4 for adjusting the positions of the cathode 1, Wehnelt 2 and the anode 3. When an accelerating voltage in the electron gun is taken as Vo volt, a current is made to flow into the electron gun so that the brightness is 1×10<SP>6</SP>×(Vo/4.5×10<SP>3</SP>) A/cm<SP>2</SP>sr or more. When the Vo is 4.5 kV, it is desirable that the brightness of the electron gun is 1×10<SP>6</SP>A/cm<SP>2</SP>sr or more, and a crossover made by the electron gun is formed on a sample side from the anode. COPYRIGHT: (C)2004,JPO
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