Aluminiumnitridsubstrat und Verfahren zu dessen Herstellung,申请号DE1998612533T-传众专利搜索

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发明名称	Aluminiumnitridsubstrat und Verfahren zu dessen Herstellung
摘要
申请公布号	DE69812533(T2)	申请公布日期	2003.11.13
申请号	DE1998612533T	申请日期	1998.10.29
申请人	TOKUYAMA CORP., TOKUYAMA	发明人	YAMAMOTO, REO;NUMATA, YOSHIHIKO;MINABE, YUICHIRO;HIKASA, MITSUTOSHI
分类号	C04B35/581;C04B37/02;C04B41/51;C04B41/88;H01L21/48;H01L23/15;H05K1/09;H05K3/40;(IPC1-7):C04B41/88	主分类号	C04B35/581
代理机构		代理人
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