发明名称 |
Embedded metal nanocrystals |
摘要 |
Low resistance metal/semiconductor and metal/insulator contacts incorporate metal nanocrystals embedded in another metal having a different work function. The contacts are fabricated by placing a wetting layer of a first metal on a substrate, which may be a semiconductor or an insulator and then heating to form nanocrystals on the semiconductor or insulator surface. A second metal having a different work function than the first is then deposited on the surface so that the nanocrystals are embedded in the second material.
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申请公布号 |
US6646302(B2) |
申请公布日期 |
2003.11.11 |
申请号 |
US20010911378 |
申请日期 |
2001.07.25 |
申请人 |
CORNELL RESEARCH FOUNDATION, INC. |
发明人 |
KAN EDWIN C.;LIU ZENGTAO;NARAYANAN VENKATASUBRAMAN |
分类号 |
H01L21/285;H01L29/423;(IPC1-7):H01L29/788 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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