| 摘要 |
PROBLEM TO BE SOLVED: To provide a plastic container whose inner face is covered with a thin film provided with a superior gas barrier characteristic, and its manufacturing method. SOLUTION: When the number of carbon atoms contained in a film is 100, the ratio of the number of nitrogen atoms is 15 or less, or that of the number of oxygen atoms is 20 or less, or that of the total number of nitrogen atoms and oxygen atoms is 27 or less. A plastic container 10 is stored in a plasma CVD device 1, the inside of the device 1 is kept at a predetermined degree of vacuum, a gaseous starting material containing carbon is supplied in the container 10, a predetermined energy is applied in the device 1 for generating plasma in the container 10 for forming a film containing amorphous carbon on the inside face of the container 10. The gas component supplied in the container 10 has a nitrogen gas 20 pts.vol or less, oxygen gas 10 pts.vol or less, or the total of nitrogen gas and oxygen gas is 15 pts.vol or less. COPYRIGHT: (C)2004,JPO |
