摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transparent conductive film sufficiently withstanding even large slide load in a pen input touch panel or the like, generating no crack and peeling, not generating a problem due to gas even if a conductive layer is formed by a sputtering method, and generating no deformation in a base material. <P>SOLUTION: The transparent conductive film is obtained by successively laminating the base material, an anchor layer for fixing the conductive layer and the conductive layer. The anchor layer is a silica layer formed by a plasma CVD method. <P>COPYRIGHT: (C)2004,JPO</p> |