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发明名称
METHOD FOR REMOVING PHOTORESIST
摘要
申请公布号
AU2003235130(A1)
申请公布日期
2003.11.10
申请号
AU20030235130
申请日期
2003.04.25
申请人
TOKYO OHKA KOGYO CO., LTD.
发明人
SHIGERU YOKOI;KAZUMASA WAKIYA;TAKAYUKI HARAGUCHI
分类号
G03F7/42;H01L21/027;H01L21/304;(IPC1-7):G03F7/42
主分类号
G03F7/42
代理机构
代理人
主权项
地址
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