摘要 |
<p><P>PROBLEM TO BE SOLVED: To effectively diffuse alkali element to a light absorbing layer with higher efficiency during the heat treatment to effectively improve energy conversion in the manufacturing process of a thin film solar battery wherein the CIGS- system light absorbing layer is formed by forming a back electrode on a substrate, forming a precursor film on the back electrode and executing the heat treatment under the Se atmosphere, and a transparent electrode is formed, via a buffer layer, on the light absorbing layer. <P>SOLUTION: In the method of manufacturing thin film solar battery, an alkali element is diffused respectively to the light absorbing layer from the substrate including alkali element and an alkali layer provided between the back electrode and precursor film. <P>COPYRIGHT: (C)2004,JPO</p> |