发明名称 WASHING APPARATUS AND WASHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a washing apparatus which can enhance the washing efficiency and quality of an object to be washed by generating the pulsation in a water flow of washing water supplied to a washing tank, and to provide a washing method. SOLUTION: This washing apparatus for washing an object immersed in the washing water in the washing tank 1 comprises the washing tank 1 where the washing water is stored in a state that the washing water overflows, and the object to be washed is immersed, a washing water supplying means 3 for supplying the washing water to the washing tank 1, and a pulsation generating means 5 for generating the pulsation in the water flow of washing water supplied to the washing tank by the washing water supplying means 3. Herewith, the washing efficiency and quality of the object to be washed can be enhanced. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003318145(A) 申请公布日期 2003.11.07
申请号 JP20020122085 申请日期 2002.04.24
申请人 HITACHI ELECTRONICS ENG CO LTD;HITACHI LTD 发明人 TAMURA MINORU
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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