STRUCTURE OF PLASMA GENERATION ANTENNA INCLUDING INDUCTIVE ANTENNA AND PLASMA GENERATOR USING INDUCTIVE ANTENNA

摘要

PURPOSE: A structure of a plasma generation antenna including an inductive antenna and a plasma generator using an inductive antenna are provided to form uniformly the non-uniform RF(Radio Frequency) field due to a coil antenna by using additionally an inductive antenna. CONSTITUTION: A structure of a plasma generation antenna including an inductive antenna includes a coil antenna(110), an inductive antenna(120), and a dielectric. The coil antenna(110) is installed nearly to the outside of a vacuum chamber in order to generate RF(Radio Frequency) signals by means of RF power. The inductive antenna(120) is used for covering a part of the coil antenna(110) in order to induct the RF signals. The dielectric is used for filling a gap between the coil antenna(110) and the inductive antenna(120). The structure of the plasma generation antenna including the inductive antenna further includes a compensation antenna(130). The compensation antenna(130) is installed at the outside of the coil antenna(110) to receive the induced RF power.