| 摘要 |
PURPOSE: A canister for a liquid delivery system is provided to be capable of smoothly carrying out a tantalum oxide layer depositing process by conserving a predetermined temperature for securing the liquid state of Ta(OC2H5) by using many kinds of heaters. CONSTITUTION: A canister for a liquid delivery system is provide with a main frame(110) for storing Ta(OC2H5) used as the deposition source of a tantalum oxide layer, a pressing pipe(120), an inlet pipe(130), and an outlet pipe(140). At this time, a plurality of heaters are used for heating the main frame, the inlet pipe and the outlet pipe, respectively. Preferably, a heat coil(150) integrated in the main frame, is used as the first heater for heating the main frame and heating tapes(160,170) are used as the second and third heater for heating the inlet pipe and the outlet pipe.
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