ABSOLUTE PRESSURE SENSOR

摘要

A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a conductive diaphragm. The reference layer is mounted on the sensor layer to form a reference vacuum cavity. The reference layer includes a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.