发明名称 |
OZONATED WATER FLOW AND CONCENTRATION CONTROL APPARATUS AND METHOD |
摘要 |
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a frst process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool. |
申请公布号 |
WO03091815(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
WO2003US12973 |
申请日期 |
2003.04.25 |
申请人 |
APPLIED SCIENCE AND TECHNOLOGY, INC. |
发明人 |
FITTKAU, JENS;SEIWERT, JOHANNES;GOTTSCHALK, CHRISTINE |
分类号 |
B01F1/00;C01B13/00;C01B13/10;C02F1/78;G05D21/00;H01L21/02;H01L21/304 |
主分类号 |
B01F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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