MANUFACTURE OF CROSSLINKED PARTICLE FROM POLYMER HAVING CROSSLINKABLE GROUP CAPABLE OF BEING ACTIVATED

摘要

PROBLEM TO BE SOLVED: To obtain a crosslinked particle useful for manufacturing a dielectric material used for an electronic device such as an integrated circuit. SOLUTION: The crosslinked particle is manufactured by activating a crosslinkable group in a synthetic polymer. The crosslinkable group remains inactive until it is activated and, when activated, an intramolecular crosslinking reaction occurs irreversibly and the crosslinked particle is formed. In terms of intermolecular crosslinking, the crosslinked particle is kept inactive with each other and against the polymer molecule under the crosslinking condition. COPYRIGHT: (C)2004,JPO