| 发明名称 |
CARRIER HEAD WITH POROSE RETAINER RING |
| 摘要 |
A material (26) with a mesh of fibers and a binder material holding the fibers in the mesh can be used on a carrier head (20) or a polishing pad (100). A polishing apparatus can include a pad cleaner (40) with nozzles (44) to direct jets of cleaning fluid onto the polishing pad (100) and a brush (49)to agitate a surface of the polishing pad (100). |
| 申请公布号 |
WO03002299(A3) |
申请公布日期 |
2003.11.06 |
| 申请号 |
WO2002US20885 |
申请日期 |
2002.07.01 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
TOLLES, ROBERT, D. |
| 分类号 |
B24B37/24;B24B37/26;B24B37/32;B24B53/007;B24B53/017;B24D3/32;B24D3/34;B24D9/08;B24D13/14 |
主分类号 |
B24B37/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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