METHOD AND APPARATUS FOR OBSERVING INNER SURFACE OF HOLE

摘要

PROBLEM TO BE SOLVED: To improve accuracy in quantitative evaluation of the inner surface of a hole to be observed. SOLUTION: A corn mirror 12 shows the inner surface 141 in a hole to be observed 14. Mirror images in the corn mirror 12 are photographed by a CCD camera 11. Corn mirror images for photographing the mirror images are developed to connection imagesΣH,ΣHe. The distorted connection imageΣHeis connected to enable the end edge development image The1 to coincide with a straight line t1. The image obtained by correcting the distorted connection imageΣHebecomes the non-distorted connection imageΣH. COPYRIGHT: (C)2004,JPO