ETCHING LIQUID, ETCHING TREATMENT METHOD OF GLASS SUBSTRATE AND REPRODUCING TREATMENT METHOD OF ETCHING LIQUID

摘要

PROBLEM TO BE SOLVED: To solve the problem that clogging occurs in a filtering stage, in piping or a tank by gelatinous solid matter produced in an etching liquid for etching a glass substrate when it is reproductively utilized. SOLUTION: An etching liquid obtained by adding a barium compound to a hydrofluoric acid-containing etching liquid is used when the surface of a glass substrate is subjected to etching treatment. Further, solid matter containing components eluted from the glass substrate is separated and removed from the etching solution by adding a barium-containing solution to the etching liquid after the etching treatment. COPYRIGHT: (C)2004,JPO