Confocal microscope having two micro-lens arrays and a pinhole array

摘要

Confocal microscope has micro-lens array for splitting an illumination beam bundle into a multiplicity of convergent partial beam bundles into order to simultaneously illuminate multiple points on a sample. Beam splitting of the illuminating light (4) is achieved with two micro-lens arrays (10, 19) with a beam divider (8) placed between them so that light reflected back from the sample only passes through both lens arrays while the illumination light only passes through the first (10). The reflected sample light also passes through a hole shutter array (22).