发明名称 SEMICONDUCTOR TEST APPARATUS HAVING MULTI PROBING PAD
摘要 PURPOSE: A semiconductor test apparatus is provided to be capable of reducing the area of a probing pad by using a multi probing pad. CONSTITUTION: A multi probing pad comprises a common probe pad for testing wafer level, a probe signal control part(30) for selecting a specific block, a probe signal generating part(50), and a multiplexing part(20). The probe signal generating part(50) applies a test signal into the specific block via the common probe pad. The multiplexing part(20) outputs selectively a normal signal corresponding to a test enable signal and the test signal from the probe signal generating part(50).
申请公布号 KR20030085182(A) 申请公布日期 2003.11.05
申请号 KR20020023355 申请日期 2002.04.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KWON, JAE HYEON
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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