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经营范围
发明名称
PROJECTION EXPOSURE APPARATUS
摘要
申请公布号
EP1041607(A4)
申请公布日期
2003.11.05
申请号
EP19980953013
申请日期
1998.11.11
申请人
NIKON CORPORATION
发明人
TAKAHASHI, MASATO;MORI, FUTOSHI
分类号
G03F7/20;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
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地址
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