发明名称 Method and a system for identifying gaseous effluents, and a facility provided with such a system
摘要 The invention relates to a gas analysis system for analyzing gases in an enclosure under controlled pressure, which system comprises apparatus for ionizing the gases to be analyzed, and apparatus for analyzing the ionized gases. According to the invention the apparatus for ionizing the gases to be analyzed comprises a dedicated plasma source in contact with the gases contained in the enclosure and combined with a generator for generating a plasma from the gases to be analyzed; and the apparatus for analyzing the ionized gases comprises a radiation sensor situated in the vicinity of the zone in which the plasma is generated, and connected to an optical spectrometer for analyzing the variation of the radiation spectrum emitted by the generated plasma.
申请公布号 US6643014(B2) 申请公布日期 2003.11.04
申请号 US20000487722 申请日期 2000.01.19
申请人 ALCATEL 发明人 CHEVALIER ERIC;MAQUIN PHILIPPE;BERNARD ROLAND
分类号 C23C16/52;G01N21/68;G01N21/73;(IPC1-7):G01N21/73 主分类号 C23C16/52
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