| 摘要 |
A laser irradiation optical system includes a dividing means for dividing a first entering laser beam once, and producing a plurality of second laser beams having beam widths equal to the beam which of the first laser beam and advancing in mutually different directions, a condensing means for condensing for condensing each second laser beam to mutually advance in near the same direction; and a shaping means for converting the intensity distribution of a cross section perpendicular to the optical path of each second laser beam in the optical paths of the mutually separated second laser beams.
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