| 发明名称 |
Method of trimming micro-machined electromechanical sensors (MEMS) devices |
| 摘要 |
A method for delicately adjusting an orientation of features in completed micro-machined electromechanical sensor (MEMS) devices after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.
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| 申请公布号 |
US6642067(B2) |
申请公布日期 |
2003.11.04 |
| 申请号 |
US20010963142 |
申请日期 |
2001.09.24 |
| 申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
DWYER PAUL W. |
| 分类号 |
B81B3/00;B81C1/00;B81C99/00;(IPC1-7):G01R31/26;H01L21/66;H01L21/00 |
主分类号 |
B81B3/00 |
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