MANUFACTURING METHOD OF PROBE, MASK FOR MANUFACTURING PROBE AND PROBE

摘要

A method is disclosed for producing a probe capable of keeping sure electric conduction between the probe and a conductive pad. The method comprises the steps of: applying photo resists 500 onto the front and rear faces of a conductive plate-form material 400 which is to make a probe 100; masking one face of the plate-form material 400 with a first mask 200, and masking the other face of the plate-form material 400 with a second mask 300; subjecting the photo resists 500 to exposure to light and development; and using the photo resists 500 remaining in the exposure and development the step as mask materials 510 to etch the plate-form material 400.