INSPECTION APPARATUS FOR ELECTRON GUN HEATER

摘要

PURPOSE: An inspection apparatus is provided to minimize defects by performing tests on the disconnection and resistance of the heater, while achieving improved reliability of the result of the inspection. CONSTITUTION: An inspection apparatus comprises a measurement unit(13) for measuring the resistance and disconnection of a heater; an extraction unit(15) for removing the heater having the disconnection or the resistance exceeding a predetermined resistance range; a control unit(14) for controlling the measurement unit and the extraction unit; a data processing unit(16) for analyzing the data output from the measurement unit, transmitting the data so as to remove the defective heater, and processing the data with respect to the removed heater; and a user interface(17) for inputting a predetermined error range to the data processing unit and checking the analyzed data.