发明名称 |
THERMAL MICRO ACTUATOR CAPABLE OF AMPLIFYING DISPLACEMENT AND METHOD FOR FABRICATING THE SAME |
摘要 |
PURPOSE: A thermal micro actuator and a method for fabricating the same are provided to amplify displacement of the thermal micro actuator by installing an arch bar at end portions of two arch bars. CONSTITUTION: A thermal micro actuator includes a substrate(50). A first electrode(51), a ground electrode(52) and a second electrode(53) are fixed to the substrate(50) in such a manner that they are parallel spaced by a predetermined distance. A first arch bar(54) extends from the first electrode(51) and the ground electrode(52). A second arch bar(55) extends from the second electrode(53) and the ground electrode(52). A third arch bar(56) extends from end portions of the first and second arch bars(54,55). A front section(58) extends from a center(57) of the third arch bar(56).
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申请公布号 |
KR20030083930(A) |
申请公布日期 |
2003.11.01 |
申请号 |
KR20020022332 |
申请日期 |
2002.04.23 |
申请人 |
KOREA ELECTRONICS TECHNOLOGY INSTITUTE |
发明人 |
KIM, GEON NYEON;LEE, GYEONG IL;PARK, GWANG BEOM;PARK, HYO DEOK;PARK, JUN SIK |
分类号 |
B81B7/00;(IPC1-7):B81B7/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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