发明名称 Variable optical attenuator (VOA), comprises a shutter with inclined faces which can be translated in a space between input and output channels by an actuator
摘要 The variable optical attenuator (1) comprises the micro-electro-mechanical (MEM) structures implemented on a substrate (9) including the input and output channels (2,3) aligned along an axis (7) and designed to receive the input and output optical fibres (4,5), respectively, and a shutter (10) which can be translated in a controlled manner in a space between the input and output channels (2,3) perpendicular to the axis (7) by an actuator (6) constituted of two matching combs (13,14). The face (20) of the shutter (10) on the side of the input channel has an inclination of about 45 degrees with respect to the direction of displacement of the shutter along its beam (11) axis (15). The two faces (20,21) of the shutter (10) situated on the sides of the input and output channels (2,3), respectively, have non-null inclinations with respect to the direction of displacement of the shutter, the two faces are symmetric with respect to the axis of displacement, and the inclination is preferentially about 45 degrees. The input light beam (30) from the core (8) of the input fibre (4) reaches the shutter (10), but only a light beam fraction (31) reaches the output fibre (5). The other light beam fraction (32) is reflected from the face (20) of the shutter and is propagated outside the space between the channels (2,3).
申请公布号 FR2839060(A3) 申请公布日期 2003.10.31
申请号 FR20020005455 申请日期 2002.04.30
申请人 MEMSCAP 发明人 KATILA PEKKA
分类号 B81B3/00;B81B7/02;G02B6/26;G02B6/35;(IPC1-7):B81B7/02;G02B26/02 主分类号 B81B3/00
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