摘要 |
A low voltage single-poly flash memory cell includes a first ion well of a first conductivity type, a second ion well of a second conductivity type formed on the first ion well, a charge storage layer comprising a first insulating layer, a trapping layer, and a second insulating layer, located on the second ion well, a gate located on the charge storage layer, a sourceand a drain of the second conductivity type located in two sides of the charge storage layer, and an ion doped region of the first conductivity type formed in the second ion well and under and surrounding the source and at least a portion of a bottom of the first insulating layer.
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