| 摘要 |
A thermal physical vapor deposition apparatus includes an elongated vapor distributor (500VD) disposed in a chamber (C) held at reduced pressure, and spaced from a structure which is to receive an organic layer in forming part of an OLED. One or more detachable organic material vapor sources (500VS1-500VS 4) are disposed outside of the chamber, and a vapor transport device (500VT) including a valve (522) sealingly connects each attached vapor source to the vapor distributor. During vapor deposition of the organic layer, the structure is moved with respect to the vapor distributor to provide an organic layer of improved uniformity on the structure.<IMAGE> |
