WAFER CHUCK WITH INTERLEAVED HEATING AND COOLING ELEMENTS,申请号EP20010950961-传众专利搜索

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发明名称	WAFER CHUCK WITH INTERLEAVED HEATING AND COOLING ELEMENTS
摘要
申请公布号	EP1356499(A2)	申请公布日期	2003.10.29
申请号	EP20010950961	申请日期	2001.07.06
申请人	TEMPTRONIC CORPORATION	发明人	COLE, KENNETH, M., SR.;STONE, WILLIAM, M.;OLSEN, DOUGLAS, S.
分类号	H05B3/18;C23C16/00;G01R31/28;H01L21/00;H01L21/02;H01L21/66;H01L21/683;H01L21/687;H05B3/70;(IPC1-7):H01L21/00	主分类号	H05B3/18
代理机构		代理人
主权项
地址

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