| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning apparatus which does not give rise to cleaning unevenness and a method for arranging piezoelectric vibrators for generating uniform vibrations by forming a circular radial surface without using the piezoelectric vibrators having multiple kinds of shapes. SOLUTION: The ultrasonic cleaning apparatus is formed with the ultrasonic radiation surface of a circular shape by arranging a plurality of the piezoelectric vibrators on a circular-shaped base surface of a cylindrical cleaning tub, in which the piezoelectric vibrator of a first shape is arranged in the central part of the base surface and the several piezoelectric vibrators of the second shape are arranged in alignment to the outer peripheral part of the piezoelectric vibrator of the first shape to form the piezoelectric vibrator group having the circular shape as a whole. The first shape is circular and the second shape can be made into the shape equally dividing the plate of the doughnut shape by the several lines passing the center thereof. COPYRIGHT: (C)2004,JPO
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