| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance mist removing filter easy in maintenance and used for collecting chemical liquid mist contained in exhaust gas. SOLUTION: The mist removing filter 2 is formed by vertically arranging a plurality of stainless steel fibers 6 provided so as to be extended in member length to integrate them. The greater part of the stainless steel fibers 6 is vertically arranged and the chemical liquid mist collected by the mist removing filter 2 is gathered to a lower part along the stainless steel fibers 6 by utilizing gravitational action to prevent pressure loss. When the diameter of the fibers is set to 12μm or less, collection efficiency is good but there is a tendency to easily raise pressure loss. When the diameter of the fibers is set to 50μm or more, no compaction is generated even if chemical liquid mist is collected but a removing ratio becomes irregular. Accordingly, the diameter of the stainless steel fibers 6 is set to about 12-50μm in order to obtain a higher removing ratio and a stable removing capacity. COPYRIGHT: (C)2004,JPO
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