发明名称 |
Semiconductor device and method of fabricating the same |
摘要 |
A collector region is formed on a semiconductor substrate. An emitter electrode, an external base electrode and a gate electrode are formed on the semiconductor substrate. The position of the interface between the gate electrode and the semiconductor substrate is rendered higher than the position of the interface between the external base electrode and the semiconductor substrate. Thus provided is a semiconductor device so improved that dispersion of the withstand voltage of a gate oxide film and dispersion of characteristics such as a threshold voltage and a drain-to-source current are reduced.
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申请公布号 |
US6638806(B2) |
申请公布日期 |
2003.10.28 |
申请号 |
US20020140942 |
申请日期 |
2002.05.09 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION |
发明人 |
IGARASHI TAKAYUKI;OOTSU YOSHITAKA |
分类号 |
H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L21/823 |
主分类号 |
H01L21/331 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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