发明名称 Semiconductor device and method of fabricating the same
摘要 A collector region is formed on a semiconductor substrate. An emitter electrode, an external base electrode and a gate electrode are formed on the semiconductor substrate. The position of the interface between the gate electrode and the semiconductor substrate is rendered higher than the position of the interface between the external base electrode and the semiconductor substrate. Thus provided is a semiconductor device so improved that dispersion of the withstand voltage of a gate oxide film and dispersion of characteristics such as a threshold voltage and a drain-to-source current are reduced.
申请公布号 US6638806(B2) 申请公布日期 2003.10.28
申请号 US20020140942 申请日期 2002.05.09
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION 发明人 IGARASHI TAKAYUKI;OOTSU YOSHITAKA
分类号 H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L21/823 主分类号 H01L21/331
代理机构 代理人
主权项
地址
您可能感兴趣的专利