发明名称 |
Multi-tool control system, method and medium |
摘要 |
A system/method for interactively monitoring and adjusting product output from a module that includes two or more preparation tools. The output is a result of the coordinated effort of the two or more semiconductor preparation tools making up the module. The first of the tools is capable of implementing a first process on a semiconductor product and producing a first output. The second of the tools is configured to receive as input the first output from the first tool. The second tool is also capable of implementing a second process on the semiconductor product and producing a second output. A module control mechanism is capable of facilitating the exchange of information between the first tool and the second tool so that the module yields a desired semiconductor product output. Certain information can also be exchanged between the first and second tools. Other system/method embodiments for output/production control are also envisioned.
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申请公布号 |
US6640151(B1) |
申请公布日期 |
2003.10.28 |
申请号 |
US19990469227 |
申请日期 |
1999.12.22 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SOMEKH SASSON;GRUNES HOWARD E. |
分类号 |
H01L21/02;H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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