METHOD AND DEVICE FOR MEASURING TEMPERATURE OF BASE MATERIAL,申请号AU20030227509-传众专利搜索

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发明名称	METHOD AND DEVICE FOR MEASURING TEMPERATURE OF BASE MATERIAL
摘要
申请公布号	AU2003227509(A1)	申请公布日期	2003.10.27
申请号	AU20030227509	申请日期	2003.04.15
申请人	TOKYO ELECTRON LIMITED;ITO, MASAFUMI	发明人	NOBUO ISHII;MASAFUMI ITO;YASUYUKI OKAMURA;TATSUO SHIINA
分类号	G01J5/00;G01K11/12;H01L21/324;(IPC1-7):G01K11/12;G01J5/08	主分类号	G01J5/00
代理机构		代理人
主权项
地址

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