HYDROSTATIC GAS BEARING, AND SPINDLE DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve the run-out accuracy of a hydrostatic gas bearing while securing static rigidity and compressed gas consumption similar to those in conventional devices. SOLUTION: This hydrostatic gas bearing is provided with a main shaft 1, and journal bearings 7 and 8 provided with a plurality of gas feed lines 41a-41d in the axial direction each comprising a plurality of gas feed holes 31a-31d disposed at constant intervals in the circumferential direction. Compressed gas is jetted from the feed holes 31a-31d in the feed lines 41a-41d to the journal bearings 7 and 8, so that the main shaft 1 is rotatably supported in the diametral direction in a non-contact state. The feed hole 31b in the feed line 41b is disposed at a middle in the circumferential direction of the feed hole 31a in the feed line 41a. The feed hole 31d in the feed line 41d is disposed at a middle in the circumferential direction of the feed hole 31c in the feed line 41c. COPYRIGHT: (C)2004,JPO