发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device having excellent characteristics by manufacturing a thin film transistor by using a semiconductor area indicating good crystallinity. <P>SOLUTION: The semiconductor device is provided with: a semiconductor layer provided with a crystalline area including a channel formation area, a source area and a drain area; a gate electrode 1205a for controlling the conductivity of the channel formation area; and the thin film transistor having a gate insulating film provided between the gate electrodes 1205a-1205d and a semiconductor layer. The semiconductor layer includes gettering areas 1203a-1203d and 1204a-1204d doped with rare gas elements. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003303831(A) 申请公布日期 2003.10.24
申请号 JP20020105383 申请日期 2002.04.08
申请人 SHARP CORP 发明人 MAKITA NAOKI
分类号 G02F1/1345;G02F1/1368;H01L21/20;H01L21/336;H01L21/8238;H01L27/08;H01L27/092;H01L29/786;(IPC1-7):H01L21/336;G02F1/134;G02F1/136;H01L21/823 主分类号 G02F1/1345
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