PERFORMANCE EVALUATION METHOD OF MULTIDIMENSIONAL COORDINATE MEASURING MACHINE, CALIBRATION GAGE AND FIXTURE OF CALIBRATION GAGE OF MULTIDIMENSIONAL COORDINATE MEASURING MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a method and a calibration gage for evaluating easily scale errors, straightness and squareness in a CMM for measuring an object to be measured multidimensionally, utilizing an inversion method. SOLUTION: The calibration gage 26 comprises an L-shaped block body 28 and a plurality of spheres 100. The spheres 100 include a row-like sphere group 110-114 and an independent sphere 120. The L-shaped calibration gage 26 is placed so that each of the spheres of the row-like sphere group is aligned in the direction of an X axis of a machine coordinate system, and each of the spheres is measured utilizing the inversion method to calculate a central coordinate or the like. According to the present invention, excess wall thickness of the block body 28 can be removed and lightened. Thereby, it is extremely convenient to handle in inversion of the calibration gage. COPYRIGHT: (C)2004,JPO