| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To make a variance in device characteristic small by fixing the distance between a heater electrode and an optical waveguide without requiring any strict aligning operation. <P>SOLUTION: On a glass substrate 20, the optical waveguide 32 is formed by an ion exchange method and nearby the optical waveguide, the heater electrode 29 is provided to manufacture an optical waveguide device structured to control the refractive index of the optical waveguide by thermooptic effect. On the glass substrate, a metal mask 22 having opening parts for optical waveguide formation and heater electrode formation is formed and a resist layer 24 which becomes soluble by exposure is formed on the mash 22; after the rear surface side of the glass substrate is shielded with a photomask 22 to hide the opening part for optical waveguide formation of the metal mask, the glass substrate is irradiated with light from the rear surface side and the metal mask is used as an exposure mask to expose the resist layer at the opening part for heater electrode formation, thereby forming the heater electrode there. <P>COPYRIGHT: (C)2004,JPO</p> |
