INSPECTION METHOD FOR COMPOSITE PATTERN AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To easily and surely inspect a composite pattern on an inspection object matter having the composite pattern comprising a plurality of pattern elements linearly connected continuously with each other.

SOLUTION: An image of the inspection object matter having the composite pattern comprising a plurality of the pattern elements linearly connected continuously with each other is inputted by an imaging means. When the composite pattern is inspected on the basis of the inputted inspection image, the pattern elements (B) of a composite pattern region (A) on the inputted inspection image are cut as unit images, and comparison processing is carried out on the basis of the cut unit images (C) to inspect the composite pattern.

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