APPARATUS FOR MONITORING LEAKAGE OF FLUID

摘要

PURPOSE: A fluid leakage monitoring apparatus is provided to enlarge a measuring area, to improve precision of measurement in the measuring area, and to easily process data by installing a plurality of flow rate measuring devices in various fluid paths. CONSTITUTION: A fluid leakage monitoring apparatus includes a pre-filter(100), a filter(102), and a regulator(104). In addition, the fluid leakage monitoring apparatus has a first selection valve(106) for selecting one of fluid paths, a pressure sensor(112) for detecting pressure of gas, a second selection valve(110), a flow rate measuring section(108) installed in each fluid path, and a temperature sensor(114) for detecting temperature of gas. The flow rate measuring section(108) has a first mass flow controller(108a) to a fourth mass flow controller(108d) for measuring flow rate in various ranges.