WORK CARRIER

摘要

A work carrier capable of moving a work stage (45) to an arbitrary position in the left/right direction and stopping the work stage (45) thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member (15) and movable guide rail members (17, 18, 19) mounted on a supporting table (10), a driver (16) for moving the movable guide rail members to the left and right, rail member interlocking mechanisms (35a, 35b) for interlockingly operating the movable guide rail members (17, 18, 19), and the work stage (45) mounted on the movable guide rail member (19), wherein the driver (16) is a motor having a rotational speed being varied by inverter control and employing an open loop rotation control system, and a plurality of stopper members (52a, 52b, 52c) are provided in order to stop the movable guide rail member (17) at a specified position.