| 发明名称 |
Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxide |
| 摘要 |
A process and apparatus for the processing of a precision surface. The process and apparatus includes contacting of a precision surface in a process chamber with liquid or supercritical carbon dioxide in which sonic waves are generated.
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| 申请公布号 |
US2003196679(A1) |
申请公布日期 |
2003.10.23 |
| 申请号 |
US20020124842 |
申请日期 |
2002.04.18 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COTTE JOHN MICHAEL;FISCH EMILY E.;MCCULLOUGH KENNETH JOHN;MOREAU WAYNE MARTIN;OKORN-SCHMIDT HARALD;POPE KEITH R.;SIMONS JOHN P.;SYVERSON WILLIAM A.;TAFT CHARLES J. |
| 分类号 |
B08B3/12;B08B7/00;B81C1/00;H01L21/00;(IPC1-7):B08B3/12 |
主分类号 |
B08B3/12 |
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