Reinigungsflüssigkeit für die Herstellung von Halbleiter-Anordnungen und Verfahren zur Herstellung von Halbleiter-Anordnungen unter Verwendung derselben,申请号DE1997624892-传众专利搜索

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发明名称	Reinigungsflüssigkeit für die Herstellung von Halbleiter-Anordnungen und Verfahren zur Herstellung von Halbleiter-Anordnungen unter Verwendung derselben
摘要
申请公布号	DE69724892(D1)	申请公布日期	2003.10.23
申请号	DE1997624892	申请日期	1997.07.30
申请人	MITSUBISHI GAS CHEMICAL CO., INC.	发明人	TORII, YOSHIMI;SASABE, SHUNJI;KOJIMA, MASAYUKI;USUAMI, KAZUHISA;TOKUNAGA, TAKAFUMI;HARA, KAZUSATO;OHIRA, YOSHIKAZU;MATSUI, TSUYOSHI;GOTOH,HIDETO;AOYAMA, TETSUO;HASEMI, RYUJI;IKEDA, HIDETOSHI;ISHIHARA, FUKUSABURO;SOTOAKA, RYUJI
分类号	C11D7/60;G03F7/42;H01L21/02;H01L21/302;H01L21/304;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321;H01L21/311	主分类号	C11D7/60
代理机构		代理人
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