Pivotable micromirror and process of manufacturing,申请号EP20000117353-传众专利搜索

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发明名称	Pivotable micromirror and process of manufacturing
摘要
申请公布号	EP1081528(B1)	申请公布日期	2003.10.22
申请号	EP20000117353	申请日期	2000.08.22
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	HOFMANN, ULRICH, DIPL.-PHYS.;WITT, MARTIN, DIPL.-ING.;WAGNER, BERND, DR. DIPL.-PHYS.;MUEHLMANN, SASCHA, DIPL.-ING.
分类号	G02B26/08;(IPC1-7):G02B26/08	主分类号	G02B26/08
代理机构		代理人
主权项
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