| 摘要 |
PURPOSE:To measure the eccentricity of the hole in the center of a cylindrical or discoid body to be measured with precision, by fitting and rotating the body to be measured and by measuring the intensity of reflected or transmitted light from the both to be measured. CONSTITUTION:Light emitted from light source 1 is expanded by beam expander 2 and through the 1st lens 4 and 2nd lens 6, body 7 to be measured is irradiated with light transmitted through slit 3. The 1st lens 4 and 2nd lens 6 contract the imge of slit 3 and form the image on body 7 to be measured. Beam splitter 5 reflects and leads part of the transmitted light from slit 3 onto the 1st photodetector 12 via the 3rd lens 11, and leads the reflected light from body 7 to the 2nd photodetector 10 via the 4th lens 9. Body 7 to be measured is fitted onto rotatable body 8. |
