| 摘要 |
PROBLEM TO BE SOLVED: To reduce the height dimension of a processor and to enhance the operation stability of the processor while enhancing process performance. SOLUTION: A liquid gathering and dispersing apparatus has a liquid storage member having a through-hole formed thereto and gathering a liquid falling from above to store the same and a liquid dispersion pipe arranged so as to make the through-hole and having an inflow hole formed to the side surface thereof to disperse the liquid flowing in from the liquid storage member. In this case, since the through-hole is formed to the liquid storage member for gathering the liquid falling from above to store the same and the liquid dispersion pipe is arranged so as to make the through-hole, liquid gathering and dispersing apparatuses 66-67 can be reduced in height dimension. As a result, the height dimension of the processor can be reduced and the processor can be miniaturized. COPYRIGHT: (C)2004,JPO
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