| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide electrically conductive ceramics which have a relative density of ≥90% and a shore hardness of ≤50, to provide a production method therefor, and to provide a vessel for metal vapor deposition which has high heat resistance and durability. <P>SOLUTION: The electrically conductive ceramics contain titanium diboride (TiB<SB>2</SB>), boron nitride (BN) and aluminum nitride (AlN) as components, and have a relative density of ≥90% and a shore hardness of ≤50. The electrically conductive ceramics are produced by subjecting mixed raw material powder containing titanium diboride, boron nitride and aluminum nitride, and one or more kinds of sintering aids selected from alkaline-earth metal oxides, rare earth element oxides and compounds to form into these oxides by heating, preferably mixed raw material powder further containing alumina powder to compacting, and thereafter performing sintering at 1,800 to 2,200°C in the presence of no carbon. The vessel for metal vapor deposition consists of the electrically conductive ceramics. <P>COPYRIGHT: (C)2004,JPO |
