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发明名称
METHOD FOR PLASMA CHARGING A PROBE
摘要
申请公布号
AU2003210503(A1)
申请公布日期
2003.10.20
申请号
AU20030210503
申请日期
2003.01.13
申请人
MICROPLATE AUTOMATION, INC.
发明人
PAUL HENSLEY;CHARLES CARNEY
分类号
B01L3/02;C40B60/14;(IPC1-7):C23C14/00;C23C16/00;H05F3/00;H01H47/32;H01T23/00
主分类号
B01L3/02
代理机构
代理人
主权项
地址
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