METHOD FOR MANUFACTURING FUSE LINE

摘要

PURPOSE: A method for manufacturing a fuse line is provided to be capable of improving die ID function fail and laser repair fail by using a stopping layer made of nitride. CONSTITUTION: A stopping layer(12) made of nitride is formed on entire surface of an insulating layer(10). The first, second and third conductive layer are sequentially stacked on the stopping layer(12). A fuse line is formed by patterning the third, second and first conductive layer. An oxide layer(20) is formed on the entire surface of the resultant structure. A photoresist pattern(22) is formed on the resultant structure. The oxide layer(20) is then selectively removed by using the photoresist pattern(22) as a mask.