| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an uniform coating without unevenness by changing the position of an exhaust vent in a treatment chamber and easily adjusting the amount of exhaust from the exhaust vent at low costs in the treatment chamber having a plurality of exhaust vents on the circumference of a bottom. <P>SOLUTION: A hollow component or a solid component can be attached to the exhaust vent located in the treatment chamber. The exhaust is closed when the solid component is attached, the amount of exhaust is adjusted when the solid component is changed to a hollow component of a different inner diameter, and thus, the position of the exhaust vent in the treatment chamber can be changed easily and the amount of exhaust can be adjusted. <P>COPYRIGHT: (C)2004,JPO |
